Drive and sense balanced, fully-coupled 3-axis gyroscope

ABSTRACT

The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

TECHNICAL FIELD

The present invention relates generally to angular velocity sensors andmore particularly relates to angular velocity sensors that includeguided mass systems.

BACKGROUND

Sensing of angular velocity is frequently performed using vibratory rategyroscopes. Vibratory rate gyroscopes broadly function by driving thesensor into a first motion and measuring a second motion of the sensorthat is responsive to both the first motion and the angular velocity tobe sensed.

In addition, conventional vibratory rate microelectromechanical systems(MEMS) gyroscopes may not provide adequate solutions that reducesensitivity to vibration and part-to-part coupling, reduce levitationforce induced in-phase offset shift, and/or reduce sensitivity topackage stress.

Accordingly, what is desired is to provide a system and method thatovercomes the above issues. The present invention addresses such a need.

The above-described deficiencies are merely intended to provide anoverview of some of the problems of conventional implementations, andare not intended to be exhaustive. Other problems with conventionalimplementations and techniques, and corresponding benefits of thevarious aspects described herein, may become further apparent uponreview of the following description.

SUMMARY

The following presents a simplified summary of the specification toprovide a basic understanding of some aspects of the specification. Thissummary is not an extensive overview of the specification. It isintended to neither identify key or critical elements of thespecification nor delineate any scope particular to any embodiments ofthe specification, or any scope of the claims. Its sole purpose is topresent some concepts of the specification in a simplified form as aprelude to the more detailed description that is presented later.

Linear and angular momentum balanced 3-axis gyroscope architectures forbetter offset stability, vibration rejection, and lower part-to-partcoupling are disclosed. In non-limiting embodiments, a linear andangular momentum balanced 3-axis gyroscope architecture is described,which can comprise one or more inner frame gyroscopes, two or more driveshuttles coupled to the one or more inner frame gyroscopes, two or moreproof masses coupled to the inner frame gyroscopes, and/or one or moreouter frame gyroscope or saddle gyroscope coupled to the inner framegyroscopes.

Various embodiments described herein can facilitate providing linear andangular momentum balanced 3-axis gyroscope architectures for betteroffset stability, vibration rejection, and lower part-to-part coupling.Further non-limiting embodiments can be directed to methods associatedwith various embodiments described herein.

These and other embodiments are described in more detail below.

BRIEF DESCRIPTION OF THE DRAWINGS

Various non-limiting embodiments are further described with reference tothe accompanying drawings, in which:

FIG. 1 illustrates a functional block diagram of non-limitingembodiments of an exemplary gyroscope architecture, according tonon-limiting aspects of the subject disclosure;

FIG. 2 illustrates a functional block diagram of non-limitingembodiments (e.g., corresponding FIG. 10) of an exemplary gyroscopearchitecture in driven motion, which demonstrates further non-limitingaspects of the subject disclosure;

FIG. 3 depicts further aspects of non-limiting embodiments of anexemplary gyroscope architecture, as described herein;

FIG. 4 depicts still further exemplary aspects of non-limitingembodiments of an exemplary gyroscope architecture;

FIG. 5 depicts still further exemplary aspects of non-limitingembodiments of an exemplary gyroscope architecture;

FIG. 6 depicts still further exemplary aspects of non-limitingembodiments of an exemplary gyroscope architecture;

FIG. 7 depicts yet another non-limiting embodiment of an exemplarygyroscope architecture, according to non-limiting aspects of the subjectdisclosure;

FIG. 8 depicts an exemplary drive mode shape of a non-limitingembodiment of an exemplary gyroscope architecture, according to furthernon-limiting aspects described herein;

FIG. 9 depicts an exemplary GX mode shape of a non-limiting embodimentof an exemplary gyroscope architecture, according to still furthernon-limiting aspects described herein;

FIG. 10 depicts an exemplary GY mode shape of a non-limiting embodimentof an exemplary gyroscope architecture, according to still furthernon-limiting aspects described herein;

FIG. 11 depicts an exemplary GZ sense mode shape of a non-limitingembodiment of an exemplary gyroscope architecture, according tonon-limiting aspects described herein;

FIG. 12 depicts an exemplary GZ parasitic mode shape of a non-limitingembodiment of an exemplary gyroscope architecture, according to stillfurther non-limiting aspects described herein;

FIG. 13 illustrates a functional block diagram of other non-limitingembodiments of an exemplary gyroscope architecture, according to furthernon-limiting aspects of the subject disclosure; and

FIG. 14 illustrates another functional block diagram of still othernon-limiting embodiments of an exemplary gyroscope architecture,according to further non-limiting aspects of the subject disclosure.

DETAILED DESCRIPTION

The present invention relates generally to angular velocity sensors andmore particularly relates to angular velocity sensors that includeguided mass systems. The following description is presented to enableone of ordinary skill in the art to make and use the invention and isprovided in the context of a patent application and its requirements.Various modifications to the preferred embodiments and the genericprinciples and features described herein will be readily apparent tothose skilled in the art. Thus, the present invention is not intended tobe limited to the embodiments shown, but is to be accorded the widestscope consistent with the principles and features described herein.Accordingly, while a brief overview is provided, certain aspects of thesubject disclosure are described or depicted herein for the purposes ofillustration and not limitation. Thus, variations of the disclosedembodiments as suggested by the disclosed apparatuses, systems, andmethodologies are intended to be encompassed within the scope of thesubject matter disclosed herein.

As noted above, conventional MEMS vibratory rate gyroscopes may notprovide adequate solutions that reduce sensitivity to vibration (e.g.,linear vibration and/or angular vibration) and part-to-part coupling,reduce levitation force induced in-phase offset shift, and/or reducesensitivity to package stress. Various embodiments described herein canovercome one or more of these and/or related drawbacks of conventionalMEMS vibratory rate gyroscopes.

The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ)linear and angular momentum balanced vibratory rate gyroscopearchitectures with fully-coupled sense modes. In a non-limiting aspect,various exemplary embodiments can employ balanced drive and/or balancedsense components to reduce induced vibrations and/or part to partcoupling, as described herein. In another non-limiting aspect, variousexemplary embodiments can employ a stress isolation frame to reducepackage induced stress, as further described herein. In yet anothernon-limiting aspect, various exemplary embodiments can employ mechanicalcoupling to facilitate linear vibration rejection. In still anothernon-limiting aspect, various exemplary embodiments can employ one ormore drive shuttles to reject levitation force induced in-phase offset.In addition, various exemplary embodiments can facilitate fabrication ofgyroscopes having improvements in cross-axis sensitivity due todecoupling of in-plane and out-of-plane gyroscopes, as described herein.

As a non-limiting example, exemplary embodiments can comprise two innerframe (e.g., GY) gyroscopes, wherein the inner frame gyroscopesfacilitate GY sense mode and can facilitate drive system coupling, oneouter frame (e.g., GX) gyroscope, wherein the outer frame gyroscopefacilitates GX sense mode and can facilitate drive system coupling, fourdrive shuttles coupled to the two inner frame gyroscopes or outer framegyroscope, four GZ proof masses coupled to the inner frame gyroscopes,and/or coupling mechanisms that facilitate coupling GZ proof masses,coupling the inner frame gyroscopes, and/or facilitate coupling theinner frame gyroscopes with the outer frame gyroscope and/or driveshuttles. In still further non-limiting aspects, various exemplaryembodiments can be configured such that components can be removed froman exemplary overall architecture to fabricate a single axis or two axisgyroscope and/or can be configured such that a number of proof-massescan be reduced in half from an exemplary overall architecture tofabricate a half-gyroscope, as further described herein. For instance,according to a non-limiting aspect, an exemplary 3-axis (e.g., GX, GY,and GZ) gyroscope can be reduced to a 2-axis or 1-axis gyroscope byremoving components from the architecture, employing fewer sensetransducers, etc., and exemplary gyroscope architectures as describedherein can be functionally cut in half to create a more compact 3-axis(e.g., GX, GY, and GZ, or fewer axes) gyroscope, by forgoing driveand/or sense balanced aspects of the exemplary 3-axis (e.g., GX, GY, andGZ) gyroscope architectures.

FIG. 1 illustrates a functional block diagram of non-limitingembodiments of an exemplary gyroscope architecture 100, according tonon-limiting aspects of the subject disclosure. As a non-limitingexample, exemplary embodiments of a gyroscope architecture 100 cancomprise a MEMS device disposed in an X-Y plane parallel to a substrate102 and can comprise two inner frame (e.g., GY) gyroscopes, that caneach comprise two inner frame proof masses (e.g., GY proof masses 104,106, 108, 110), coupled with lever arms 112, 114, 116, 118, whereininner frame gyroscopes are configured to facilitate providing a GY sensemode, or measuring a component of angular velocity associated with theMEMS device around an axis (e.g., Y axis), and can be configured tocouple the drive system with the inner frame gyroscopes. In a furthernon-limiting aspect, exemplary embodiments of a gyroscope architecture100 can comprise a coupling mechanism that couples the two inner frame(e.g., GY) gyroscopes to each other. In a further non-limiting aspect,exemplary embodiments of a gyroscope architecture 100 can comprise adrive system comprising four drive shuttles (not shown), comprisingguided masses and configured to be coupled to the two inner framegyroscopes, respectively.

In another non-limiting aspect, exemplary gyroscope architecture 100 cancomprise four GZ proof masses (e.g., GZ proof masses 120, 122, 124,126), configured to be coupled to each other via coupling mechanisms 128and 130 (e.g., via a spring and/or other coupling structures),respectively, wherein respective pairs of the four GZ proof masses(e.g., GZ proof masses 120, 122, 124, 126) are coupled to each other viacoupling mechanisms or lever arms 128, 130 that are configured to couplethe respective pairs of the four proof masses (e.g., GZ proof masses120, 122, 124, 126) motions, and wherein the four GZ proof masses (e.g.,GZ proof masses 120, 122, 124, 126) can be configured to facilitateproviding a GZ sense mode, or measuring a component of angular velocityassociated with the MEMS device around another axis (e.g., Z axis). Instill another non-limiting aspect, exemplary gyroscope architecture 100can comprise an outer frame or saddle (e.g., GX) gyroscope (e.g., GX)that can comprise two outer frame gyroscopes, comprising two pairs oftwo proof masses (e.g., GX proof mass 132, 134, 136, 138), wherein theGX, outer frame, or saddle gyroscope can be configured to facilitateproviding a GX sense mode, or measuring a component of angular velocityassociated with the MEMS device around another axis (e.g., X axis), canbe configured to be coupled to the inner frame gyroscopes, respectively,and can be configured to couple the drive system with the outer framegyroscopes, wherein respective pairs of two GX proof masses (e.g., GXproof mass 132/134, 136/138) can be configured to be coupled to eachother, and wherein respective GX proof masses of the pairs (e.g., GXproof mass 132/134, 136/138) can be configured to be coupled to eachother via respective outer frame lever arms 140/142.

In still other non-limiting aspects, exemplary gyroscope architecture100 can comprise exemplary anchor points (e.g., depicted herein asrectangles with an X), which can facilitate anchoring various componentsto the substrate 102 and/or to an exemplary stress isolation frame (notshown) configured to be attached to the substrate 102 or package. Infurther non-limiting aspects, exemplary gyroscope architecture 100 ofFIG. 1 is depicted comprising exemplary fixed pivot points 144 (e.g.,black-filled circles), which can functionally represent a center aboutwhich various components can be configured to rotate (e.g., in a planeparallel to the X-Y plane of the substrate 102, in a plane orthogonal tothe X-Y plane of the substrate 102, etc.), which can comprise exemplaryanchor points, and comprising exemplary translating pivot points 146(e.g., white-filled circles), which can functionally represent a pivotpoint or hinge about which various components can be configured torotate and translate (e.g., in a plane parallel to the X-Y plane of thesubstrate 102, in a plane orthogonal to the X-Y plane of the substrate102, etc.). These exemplary pivot points can be understood to be afunctional representation of the centers of rotational motions as aresult of the processes required to create such devices via MEMSfabrication, which typically comprise a set of springs, flexures, rigidbodies, or suspension mechanisms or components arranged to produce thedesired motion, as further described herein.

Accordingly, exemplary gyroscope architecture 100 of FIG. 1 is depictedcomprising exemplary springs (e.g., spring 145), suspension elements, orcoupling mechanisms, which can comprise flexures or other structuresthat are particularly rigid, or flexibly and/or torsionally compliant inparticular directions to constrain or define motions (e.g., toanti-phase motion, to in-plane motion, to guide mass motions of guidedmasses, etc.) and/or transfer motions of the various components ofexemplary gyroscope architecture 100, suspend various components ofexemplary gyroscope architecture 100 to exemplary anchor points 302, forexample, as depicted in FIG. 3, function as exemplary fixed pivot points144 and/or exemplary translating pivot points 146, and so on, as furtherdescribed herein.

As a non-limiting example, exemplary gyroscope architecture 100 of FIG.1 is depicted as comprising an outer frame or saddle (e.g., GX)gyroscope (e.g., GX, outer frame, or saddle gyroscope) that can comprisetwo GX outer frame gyroscopes, comprising two pairs of two proof masses(e.g., GX proof mass 132, 134, 136, 138), wherein the GX, outer frame,or saddle gyroscope can be configured to be coupled to the inner framegyroscopes (e.g., via coupling 148/150), respectively, to lever arm112/114 of exemplary GY frame gyroscope comprising GY proof masses 104,106, thereby facilitating providing a fixed pivot point between leverarm 112/114 of exemplary GY frame gyroscope and GX proof masses 132/134.Likewise, exemplary GX, outer frame, or saddle gyroscope can beconfigured to be coupled to the inner frame gyroscopes (e.g., viacoupling 152/154), respectively, to lever arm 116/118 of exemplary GYframe gyroscope comprising GY proof masses 108, 110, therebyfacilitating providing a fixed pivot point between lever arm 116/118 ofexemplary GY frame gyroscope and GX proof masses 136/138. Such exemplarycoupling is shown schematically in FIGS. 3-6, for example.

As another non-limiting example, respective pairs of the four exemplaryGZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) can becoupled to each other via coupling mechanisms or lever arms 128, 130that are configured to coupled the respective pairs of the four proofmasses (e.g., GZ proof masses 120/122, 124/126) motions. For instance,exemplary GZ proof mass 120 is coupled to exemplary GZ proof mass 122via coupling mechanisms or lever arm 128 and configured to force therespective pair of the four proof masses (e.g., exemplary GZ proof mass120/122) into anti-phase motion, generally in an X-Y plane, parallel toexemplary substrate 102, as a result of a component of angular velocityassociated with the MEMS device around the Z-axis. Such exemplarycoupling is shown in FIG. 1 functionally as a rotation of couplingmechanisms or lever arm 128 about a fixed pivot point, centered oncoupling mechanisms or lever arm 128, and is shown schematically inFIGS. 3-6, for example.

As another non-limiting example, the two exemplary inner framegyroscopes can be configured to be coupled to each other (e.g., shownfunctionally via a spring coupling exemplary GY proof mass 106 toexemplary GY proof mass 108, such as shown schematically as spring 145of FIG. 1 associated with GX proof mass 136) to facilitate constraininga motion associated with the two GY or inner frame gyroscopes into acondition of linear and angular momentum balance. For instance, asfurther described herein exemplary GY proof mass 106 can be coupled toexemplary GY proof mass 108 via a spring or other structure orcombination of structures that can facilitate constraining a motionassociated with the two inner frame gyroscopes into a condition oflinear and angular momentum balance, as further described herein. Suchcoupling is shown schematically in FIGS. 3-6, for example. In anothernon-limiting example, the two exemplary GX, or outer frame (saddle)gyroscopes, each comprising two proof masses (e.g., GX proof mass 132,134, 136, 138) can be coupled, respectively, to the two exemplary GY orinner frame gyroscopes, and/or can be configured to couple the twoexemplary GX, outer frame, or saddle gyroscope to the four driveshuttles (not shown), as further described herein. For instance, such acoupling is shown in FIG. 3, schematically, as the GY proof masses108/110 (104/106) between GX proof masses 136 and 138 (132 and 134)(e.g., via springs, flexures, drive shuttles, lever arms 112, 114, 116,118, etc.), thereby providing an axis of rotation for the GY proofmasses 104, 106, 108, 110 transverse across the GX proof masses 132,134, 136, 138, while transferring respective motions of the GY proofmasses 104 and 106 (108 and 110) to the GX proof masses 132, 134, 136,138. Such exemplary coupling is shown schematically in FIGS. 3-6, forexample.

In addition, exemplary gyroscope architecture 100 of FIG. 1 is depictedcomprising various sense electrodes or transducer elements, which can berespectively configured to detect motions of the various proof masses orother components of the exemplary gyroscope architecture 100, forexample, to detect motions as a result of Coriolis forces induced on thevarious proof masses to provide a measure of the angular velocity aboutthe X, Y, or Z axes, to detect drive motions, etc. Althoughelectrostatic actuators and transducers are described throughout thisspecification, one of ordinary skill in the art recognizes that avariety of actuators and/or transducers could be utilized for thesefunctions, and that use would be within the spirit and scope of thesubject disclosure. For example, exemplary actuators and/or transducerscould comprise piezoelectric, thermal, electromagnetic, actuators and/ortransducers, or the like. In a non-limiting aspect, exemplary gyroscopearchitecture 100 can comprise capacitive electrodes 156, 158, 160, 162,configured to respectively detect motions of exemplary GX proof masses132, 134, 136, 138, and can comprise capacitive electrodes 164, 166,168, 170 configured to respectively detect motions of exemplary GY proofmasses 104, 106, 108, 110, and so on. As further described herein, itcan be understood that exemplary capacitive electrodes 156, 158, 160,162, 164, 166, 168, 170 can be configured to primarily facilitatedetection of Coriolis forces acting on respective proof masses as aresult of angular velocity associated with the MEMS device aboutrespective axes (e.g., X or Y axes). As further described herein, theseCoriolis forces acting on respective proof masses as a result of angularvelocity associated with the MEMS device about respective axes (e.g., Xor Y axes) can result in out-of-plane motions of the respective proofmasses, wherein the out-of-plane motion is defined as motion in thedirection of the Z axis (e.g., out of the X-Y plane).

In addition, exemplary gyroscope architecture 100 of FIG. 1 is depictedas undergoing drive motion in FIG. 2, at a particular instance in time,which is indicated by a solid arrow in the direction of the respectivevarious components of exemplary gyroscope architecture 100. As furtherdescribed herein, to generate the drive motion, an electrostatic forcecan be applied with exemplary drive combs (not shown) that can becoupled to exemplary drive shuttles (not shown), respectively, whichexemplary drive shuttles can comprise the guided masses configured to becoupled to the two inner frame gyroscopes, the GX, outer frame, orsaddle gyroscope, and/or combinations, or portions thereof, as describedherein. By applying an alternating current (AC) voltage to therespective exemplary drive combs (not shown) at a drive frequency, anelectrostatic force can be applied via the exemplary drive combs (notshown) to the exemplary drive shuttles (not shown) to generate the driveforce at the drive frequency, which can result in the drive motions ofthe respective various components of exemplary gyroscope architecture100 as indicated in FIG. 1. This drive force applied to respectiveexemplary drive shuttles (not shown) is configured to be transferred tothe various components of exemplary gyroscope architecture 100, via theabove described coupling mechanisms, lever arms, pivot points, andsprings, as described above, which results in the drive motions of thevarious components of exemplary gyroscope architecture 100, as depictedin FIG. 1, and which results in the translation of the variouscomponents of exemplary gyroscope architecture 100, as depicted in FIG.2. Note that FIG. 2 depicts deflection of various components ofexemplary gyroscope architecture 100 as a result of a Coriolis forcefrom angular velocity about the respective axes with the given directionof drive motion as positive (e.g., GX+, GY+), or above the X-Y plane ofthe MEMS device, and as negative (e.g., GX−, GY−), or below the X-Yplane of the MEMS device.

Note that, as described above, the four exemplary GZ proof masses (e.g.,GZ proof masses 120, 122, 124, 126) are configured to be coupled (e.g.,via a spring or other coupling structure) to the four GY proof masses104, 106, 108, 110, respectively, wherein respective pairs of the fourGZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) are coupledto each other via coupling mechanisms or lever arms 128, 130 that areconfigured to couple the respective pairs of the four proof masses(e.g., GZ proof masses 120, 122, 124, 126) motions. As further describedherein, a Coriolis force acting on respective GZ proof masses (e.g., GZproof masses 120, 122, 124, 126) as a result of angular velocityassociated with the MEMS device about the Z axis can result in motionsof the respective GZ proof masses (e.g., GZ proof masses 120, 122, 124,126), generally in-plane, wherein the in-plane motion is defined asmotion in the direction of the X axis (e.g., in the X-Y plane), asdepicted. Accordingly, respective GZ proof masses (e.g., GZ proof masses120, 122, 124, 126) of exemplary gyroscope architecture 100 of FIG. 1 isdepicted as experiencing a sensed motion, at a particular instance intime, which is indicated by a dashed arrow in the direction of therespective various components of exemplary gyroscope architecture 100 inFIG. 2.

Thus, as a further non-limiting example, exemplary gyroscopearchitecture 100 can comprise further capacitive electrodes (not shown)that can be configured to respectively detect motions of respective GZproof masses (e.g., GZ proof masses 120, 122, 124, 126). As furtherdescribed herein, it can be understood that such exemplary capacitiveelectrodes can be configured to primarily facilitate detection ofCoriolis forces acting on respective proof masses as a result of angularvelocity associated with the MEMS device about the Z axis. As describedabove, although the transducers, electrodes, or actuators (e.g., drivecombs) are described above as capacitive transducers, electrodes, oractuators, various types of transducers, electrodes, or actuators couldbe utilized including, but not limited to piezoelectric, thermal,electromagnetic, optical, or the like, as appropriate, and its use wouldbe within the spirit and scope of the disclosed subject matter.

FIG. 2 illustrates a functional block diagram 200 of non-limitingembodiments (e.g., corresponding FIG. 1) of an exemplary gyroscopearchitecture in driven motion, which demonstrates further non-limitingaspects of the subject disclosure. FIG. 2 depicts resulting translationand rotation motions of the various components of exemplary gyroscopearchitecture 100 as a result of drive force applied to respectiveexemplary drive shuttles (not shown) and transferred to the variouscomponents of exemplary gyroscope architecture 100, via the abovedescribed coupling mechanisms, lever arms, pivot points, and springs, asdescribed above. Note further that some reference characters and/orcomponents of exemplary gyroscope architecture 100, as depicted in FIG.1, are not shown in functional block diagram 200, for clarity.

Several points are apparent from a review of FIGS. 1-2. First, note thatthe drive motions of the respective proof masses and components arelinear and/or angular momentum balanced, according to variousnon-limiting embodiments. That is, drive motion of exemplary driveshuttles (not shown) can be in anti-phase motion or opposite directions,as further described herein. Secondly, drive motions of the two innerframe gyros are also anti-phase or in opposite directions, which isfacilitated by the coupling of the anti-phase drive motion of the fourexemplary drive shuttles (not shown) to the GY proof masses (e.g., GYproof masses 104, 106, 108, 110) via the respective exemplary lever arms112, 114, 116, 118 that provides rotation about the fixed pivot pointsand translation of the X proof masses (e.g., GX proof masses 132, 134,136, 138) via the pivot points, and which is facilitated by coupling thetwo exemplary GY or inner frame gyroscopes to each other (e.g., shownfunctionally via a spring coupling exemplary GY proof mass 106 toexemplary GY proof mass 108, such as shown schematically as spring 145of FIG. 1 associated with GX proof mass 136). Thus, the two inner framegyroscopes comprise a four bar system that deforms into a parallelogramunder applied drive motion. In addition, the coupling of the exemplaryGX, outer frame, or saddle gyroscope to the respective GY or inner framegyroscopes ensures that the drive motions of the GX, outer frame, orsaddle gyroscope are also anti-phase or in opposite directions. Lastly,note that drive motions of the four exemplary GZ proof masses (e.g., GZproof masses 120, 122, 124, 126) coupled (e.g., via a spring or othercoupling structure) to the GY proof masses (e.g., GY proof masses 104,106, 108, 110), respectively, are also anti-phase or in oppositedirections. As a result, the drive motion of the 3-axis (e.g., GX, GY,and GZ) gyroscope depicted in FIGS. 1-2 can benefit from linear andangular momentum balance, according to exemplary aspects describedherein.

According to various non-limiting embodiments, by employing balancedmasses, arranged such that their drive motions are opposite to eachother and such that their net linear momentum and angular momentum fromdrive motion are zero, vibration rejection can be improved. For example,by coupling various components of exemplary gyroscope architecture 100,these various components do not move independently of each other. Asused herein, motion in same direction is referred to as common motion,or common mode, and motion in opposite direction is referred to asanti-phase motion, or differential motion. It can be that understoodcommon motion is susceptible to acceleration from outside sources, suchas vibration, where acceleration can be thought of as a uniform bodyload. And because it is uniform, it is by definition in one direction,or linear acceleration. This linear acceleration will excite commonmotion. However, because the various drive motions are coupled,physically, to ensure it is anti-phase (not common) or in oppositedirections, a uniform body load or linear acceleration will not create amotion in the sense mode, which improves ability to reject vibration, invarious non-limiting aspects. Moreover, by employing balanced masses,arranged such that their drive motions are opposite to each other andsuch that their net linear momentum and angular momentum from drivemotion are zero, torque applied to a device package at the drivefrequency to the printed circuit board (PCB) can be minimized Thus, inexemplary implementations where multiple MEMS gyroscope devices aremounted to the same PCB, where resonant frequencies are close to eachother, exemplary devices as described herein can minimize cross-talk, orpart to part coupling, that might otherwise result in undesirable noiseand offsets on the devices experiencing cross-talk as a result ofunbalanced masses or momentum.

Note that, as in FIG. 1, FIG. 2 depicts deflection of various componentsof exemplary gyroscope architecture 100 as a result of a Coriolis forcefrom angular velocity about the respective axes with the given directionof drive motion as positive (e.g., GX+, GY+), or above the X-Y plane ofthe MEMS device, and as negative (e.g., GX−, GY−), or below the X-Yplane of the MEMS device. Thus, it can be seen in FIGS. 1-2, under thegiven drive motion, a Coriolis force from angular velocity about therespective axes with the given direction of drive motions will result inout-of-plane (e.g., out of X-Y plane) deflection of the GY or innerframe gyroscopes and the GX, outer frame, or saddle gyroscope. Asdescribed above, exemplary capacitive electrodes 156, 158, 160, 162,164, 166, 168, 170 can be configured to primarily facilitate detectionof Coriolis forces acting on respective proof masses as a result ofangular velocity associated with the MEMS device about respective axes(e.g., X or Y axes).

However, note further that the four exemplary GZ proof masses (e.g., GZproof masses 120, 122, 124, 126) are coupled (e.g., via a spring orother coupling structure) to the GY proof masses (e.g., GY proof masses104, 106, 108, 110), respectively, wherein respective pairs of the fourexemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126) arecoupled to each other via coupling mechanisms or lever arms 128, 130that are configured to couple the respective pairs of the four proofmasses (e.g., GZ proof masses 120, 122, 124, 126) motions. Thus, thedrive motions of the four exemplary GZ proof masses (e.g., GZ proofmasses 120, 122, 124, 126) is in the Y direction, and a Coriolis forcefrom angular velocity about the Z axis with the given direction of drivemotions will result in-plane (e.g., in the X-Y plane) deflection in theX direction. Thus, exemplary gyroscope architecture 100 can comprisefurther capacitive electrodes (not shown) that can be configured torespectively detect motions of respective GZ proof masses (e.g., GZproof masses 120, 122, 124, 126) to primarily facilitate detection ofCoriolis forces acting on respective proof masses as a result of angularvelocity associated with the MEMS device about the Z axis.

Note regarding FIGS. 1-2 that an exemplary drive system can be decoupledfrom exemplary GX, outer frame, or saddle gyroscope and/or the exemplaryGY or inner frame gyroscopes, such that the drive motion on both theexemplary GX, outer frame, or saddle gyroscope and the exemplary GY orinner frame gyroscopes can be symmetric, and/or the GZ gyroscopescomprising the GZ proof masses (e.g., GZ proof masses 120, 122, 124,126) can be configured such that compliance of the GZ gyroscopescomprising the GZ proof masses (e.g., GZ proof masses 120, 122, 124,126) to out-of-plane motion can be made very stiff, according to variousnon-limiting aspects. However, as depicted in FIGS. 11-12, for example,note that exemplary embodiments as described herein can experienceparasitic modes on GZ sense modes, in a further non-limiting aspect.

As noted above, conventional MEMS vibratory rate gyroscopes may notprovide adequate solutions that reduce sensitivity to vibration (e.g.,linear vibration and/or angular vibration) and part-to-part coupling,reduce levitation force induced in-phase offset shift, and/or reducesensitivity to package stress. However, according to variousnon-limiting implementations, as described herein, by placing theexemplary drive system in exemplary drive shuttles (not shown), and byemploying weak coupling between the out-of-plane gyroscopes (e.g., GY orinner frame gyroscopes and GX, outer frame, or saddle gyroscope),various non-limiting embodiments can facilitate minimizing theout-of-plane or levitation force transferred to the GZ gyroscopes,and/or it can be rejected. In addition, decoupling of in-plane andout-of-plane gyroscopes can result in improvements in cross-axissensitivity.

This can result in better offset stability, because, being a sensor thatmeasures a quantity of interest, e.g., angular velocity about the Z axisby detection of the Coriolis force on the four exemplary GZ proof masses(e.g., GZ proof masses 120, 122, 124, 126), the sensor is expected tooutput a signal that is proportional to the angular velocity. Bydecoupling or employing weak coupling between the out-of-planegyroscopes (e.g., GY or frame gyroscopes and GX, outer frame, or saddlegyroscope) and the in-plane gyroscopes (e.g., GZ gyroscope), the offsetor bias error, which is how much shift there is between the quantity ofinterest and the quantity being reported (e.g., Coriolis force as aresult of angular velocity about the z-axis), there will be reducedout-of-plane force (or levitation force) on the GZ gyroscope, whichmight otherwise be sensed as an applied angular velocity.

For example, various embodiments described herein can reduce levitationforce induced in-phase offset shift via employment of exemplary driveshuttles (not shown) on the GX and/or GY gyroscopes. For instance, asdescribed above, GY or inner frame gyroscopes and GX, outer frame, orsaddle gyroscope are out-of plane gyroscopes, where MEMS device rotationaround the X or Y axes will result in out-of-plane motion of the GYproof masses (e.g., GY proof masses 104, 106, 108, 110) and GX proofmasses (e.g., GX proof masses 132, 134, 136, 138). Rotation of the MEMSdevice around the Z axis will only result in motion of the fourexemplary GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126)in-plane or parallel to the X-Y plane, which is the plane of the MEMSdevice, as a result of coupling four exemplary GZ proof masses (e.g., GZproof masses 120, 122, 124, 126) to each other via coupling mechanismsor lever arms 128, 130. By constraining the motions of the in-planemotion components (GZ) separately from the out-of-plane motioncomponents (GX, GY), and by connecting the out-of-plane motioncomponents (GX, GY) with the flexible coupling mechanism (e.g., viacoupling 148, 150, 152, 154), the in plane motion components (GZ) (e.g.,GZ proof masses 120, 122, 124, 126), the transmission of the levitationforce (and associated offset shift) associated with the out-of-planemotion components (GX, GY) can be minimized.

FIG. 3 depicts further aspects of non-limiting embodiments of anexemplary gyroscope architecture 100, as described herein. Note therelative locations and configurations of the exemplary GY proof masses(e.g., GY proof masses 104, 106, 108, 110), exemplary GX proof masses(e.g., GX proof masses 132, 134, 136, 138), the coupling there between,exemplary lever arms 112, 114, 116, 118, anchors 302, and varioussprings 145 (e.g., GZ spring 304, etc.), couplings (e.g., GX or outerframe gyro to drive shuttle coupling 306, etc.), suspension elements,etc. depicted therein.

In addition, FIG. 3 depicts an exemplary stress isolation frame 308,according to further non-limiting aspects. Recall that offset shift canbe induced by levitation force induced in the drive shuttles or inducedby deformation of the gyroscope structure due to external stresses(e.g., package stresses). Offset shift can also be affected by othersources such as package stress, temperature effects, etc. In order todecouple package deformation from exemplary devices and, thus, minimizepackage deformation induced offset, an exemplary stress isolation frame308 can be employed in various non-limiting embodiments. While not shownin FIG. 1, an exemplary stress isolation frame 308 can be shownconnected to all the outer anchor points 302 illustrated in FIG. 3.Here, note that the exemplary stress isolation frame 308 can beconnected to the package or the substrate 102, and the peripheralcomponents of the components of exemplary gyroscope architecture 100 canbe suspended therefrom and/or anchored to, including, but not limited tothe four exemplary drive shuttles 310, exemplary coupling mechanisms orlever arms 128, 130, etc. As a result, package bend or deformationsensitivity can be improved, according to further non-limiting aspects,wherein offset resulting from bending of a package associated with theMEMS device can be reduced by employing one or more of an exemplarystress isolation frame 308, along with exemplary drive shuttles 310,etc., as described herein.

FIG. 3 further depicts exemplary drive sense combs 312, which can beconfigured to detect drive motion. Note that, while exemplary drivesense combs 312 are depicted as coupled to GY or inner frame gyroscopecomponents (e.g., GY proof masses 104, 106, 108, 110), in non-limitingembodiments, in further non-limiting embodiments, exemplary drive sensecombs 312 can be coupled to other of the various components of theexemplary gyroscope architecture 100, including, but not limited to, oneor more of the four exemplary drive shuttles 310, etc. FIG. 3 furtherdepicts exemplary drive combs 314, which can be coupled to the exemplarydrive shuttles 310 to generate the drive force at the drive frequency,and which can result in the drive motions of the respective variouscomponents of exemplary gyroscope architecture 100, as described aboveregarding FIGS. 1-2. In addition, FIG. 3 depicts further capacitiveelectrodes 316 that can be configured to respectively detect motions ofrespective GZ proof masses (e.g., GZ proof masses 120, 122, 124, 126),as further described above regarding FIGS. 1-2.

FIG. 4 depicts still further exemplary aspects of non-limitingembodiments of an exemplary gyroscope architecture 100. For instance,FIG. 4 depicts relative locations of exemplary capacitive electrodes156, 158, 160, 162, 164, 166, 168, 170, in the depiction of FIG. 3,which can be configured to primarily facilitate detection of Coriolisforces acting on respective proof masses as a result of angular velocityassociated with the MEMS device about respective axes (e.g., X or Yaxes), for example, as further described above regarding FIG. 1.

FIG. 5 depicts still further exemplary aspects of non-limitingembodiments of an exemplary gyroscope architecture 100. Note that inFIG. 5, anchor 302 locations are depicted as black boxes, instead of asin FIGS. 1-2. FIG. 5 depicts inset 502, which is further described,regarding FIG. 6. For example, FIG. 6 depicts still further exemplaryaspects of non-limiting embodiments of an exemplary gyroscopearchitecture 100. FIG. 6 depicts the relative locations andconfigurations of various components of exemplary gyroscope architecture100, as depicted in FIGS. 1-5, for inset 502. FIG. 7 depicts yet anothernon-limiting embodiment of an exemplary gyroscope architecture 100,depicting relative locations of exemplary capacitive electrodes 156,158, 160, 162, 164, 166, 168, 170, in the depiction of FIG. 7, which canbe configured to primarily facilitate detection of Coriolis forcesacting on respective proof masses as a result of angular velocityassociated with the MEMS device about respective axes (e.g., X or Yaxes), for example, as further described above regarding FIGS. 1, 4,etc. Note further the fabrication design of the coupling mechanisms orlever arms 128, 130 that are configured to couple the respective pairsof the four proof masses (e.g., GZ proof masses 120, 122, 124, 126)motions, which corresponds respectively to construction of a functionalfixed pivot point between respective pairs of GZ proof masses, asdescribed above regarding FIGS. 1-2.

FIG. 8 depicts an exemplary drive mode shape of a non-limitingembodiment of an exemplary gyroscope architecture 100, according tofurther non-limiting aspects described herein. As depicted in FIG. 2,drive motion applied via the four exemplary drive shuttles 310 asdescribed above result in deflection and translation of the variouscomponents of exemplary gyroscope architecture 100, as described herein.It can be seen in FIG. 8 from the relative lack of displacement of thein-plane motion components (GZ), which are separated from theout-of-plane motion components (GX) and constrained by the couplingmechanisms or lever arms 128, 130 that are configured to couple therespective pairs of the four proof masses (e.g., GZ proof masses 120,122, 124, 126) motions, various embodiments as described herein can beconfigured to constrain transmission of the out-of-plane motioncomponents (GX, GY) to the in plain motion components (GZ) (driveshuttle, Z proof masses), and, thus, the transmission of the levitationforce associated with the out-of-plane motion components (GX, GY) can beminimized.

FIG. 9 depicts an exemplary GX mode shape of a non-limiting embodimentof an exemplary gyroscope architecture 100, according to still furthernon-limiting aspects described herein. FIG. 9 depicts the relativedisplacement above and below X-Y plane, where the “+” symbol indicatesabove plane X-Y plane displacement and the “−” symbol indicates belowplane displacement, in lieu of color heat map or adequate grey scaleresolution. It can be seen in FIG. 9, that the GX, outer frame, orsaddle gyroscope sense mode is a balanced sense mode, where each of theGX proof masses are in anti-phase motion, as facilitated by exemplaryfixed pivot point functionally generated by the structures indicated inFIG. 9.

FIG. 10 depicts an exemplary GY mode shape of a non-limiting embodimentof an exemplary gyroscope architecture, according to still furthernon-limiting aspects described herein. FIG. 10 depicts the relativedisplacement above and below X-Y plane, where the “+” symbol indicatesabove plane X-Y plane displacement and the “−” symbol indicates belowplane displacement, in lieu of color heat map or adequate grey scaleresolution. It can be seen in FIG. 10, that GY or frame gyroscope sensemode is a balanced sense mode, where each of the GY proof masses are inanti-phase motion (e.g., both linear and angular momentum balanced). Itcan be further seen in FIG. 10 from the relative lack of displacement ofthe in-plane motion components (GZ), which are separated from theout-of-plane motion components (GX) and constrained by the couplingmechanisms or lever arms 128, 130 that are configured to couple therespective pairs of the four proof masses (e.g., GZ proof masses 120,122, 124, 126) motions, various embodiments as described herein can beconfigured to constrain transmission of the out-of-plane motioncomponents (GX, GY) to the in plain motion components (GZ) (driveshuttle, Z proof masses), and, thus, the transmission of the levitationforce associated with the out-of-plane motion components (GX, GY) can beminimized. In addition, it can be seen from FIG. 10 can facilitateisolation of levitation forces on the drive combs (e.g., drive combs314) from being transferred to the frame proof masses.

FIG. 11 depicts an exemplary GZ sense mode shape of a non-limitingembodiment of an exemplary gyroscope architecture, according tonon-limiting aspects described herein. FIG. 11 depicts the relativedisplacement in the X-Y plane, where the “+” symbol indicates +Xdisplacement and the “−” symbol indicates −X displacement, in lieu ofcolor heat map or adequate grey scale resolution. It can be seen in FIG.11, that the GZ gyroscope sense mode is a balanced sense mode, whereeach of the GZ proof masses are in anti-phase motion.

FIG. 12 depicts an exemplary GZ parasitic mode shape of a non-limitingembodiment of an exemplary gyroscope architecture, according to stillfurther non-limiting aspects described herein. FIG. 12 depicts therelative displacement in the X-Y plane, where the “+” symbol indicates +displacement and the “−” symbol indicates − displacement, in lieu ofcolor heat map or adequate grey scale resolution. It can be seen in FIG.12, that the GZ gyroscope has a linear and angular momentum balancedparasitic mode.

Accordingly, exemplary non-limiting embodiments can comprise a 3-axisCoriolis vibratory rate gyroscope, in a roughly 2 dimensional devicearchitecture, with the geometry largely being flat, and capable of beingfabricated in silicon. In non-limiting aspects, exemplary embodiments asdescribed herein can comprise two inner frame (e.g., GY) gyroscopes,wherein the inner frame gyroscopes facilitate GY sense mode and drivesystem coupling, two outer frame, or saddle gyroscope, four driveshuttles coupled to the two outer frame gyroscopes, four GZ proof massescoupled to the GY or inner frame gyroscopes, and/or two lever arms orcoupling mechanisms that facilitate coupling GZ proof masses. In stillfurther non-limiting aspects, various exemplary embodiments can beconfigured such that components can be removed from an exemplary overallarchitecture to fabricate a single axis or two axis gyroscope and/or canbe configured such that a number of proof-masses can be reduced in halffrom an exemplary overall architecture to fabricate a half-gyroscope, asfurther described herein.

For example, FIG. 13 illustrates a functional block diagram of othernon-limiting embodiments of an exemplary gyroscope architecture 100,according to further non-limiting aspects of the subject disclosure. Forinstance, according to a non-limiting aspect, an exemplary 3-axis (e.g.,GX, GY, and GZ) gyroscope architecture 100 can be reduced to a 2-axis or1-axis gyroscope by removing components from the architecture, employingfewer sense transducers, etc., and exemplary gyroscope architectures asdescribed herein can be functionally cut in half to create a morecompact 3-axis (e.g., GX, GY, and GZ) gyroscope, by forgoing driveand/or sense balanced aspects of the exemplary 3-axis (e.g., GX, GY, andGZ) gyroscope architectures. For instance, as depicted in FIG. 13, thefour GZ proof masses can be omitted to fabricate a balanced two axis(e.g., X-Y gyroscope). In a further non-limiting aspect, two GX proofmasses, or outer frame gyroscopes and respective GY or inner framegyroscope can be omitted from the fabrication as in FIG. 15 to yield a2-axis gyroscope in half the footprint of the balanced 2-axis gyroscope.In other non-limiting aspects, GY electrodes 162, 164, 166, 168 can beomitted from the fabrication or electrical connection, such thatvariants of exemplary gyroscope architecture 100 could yield a 1-axisgyroscope.

In another non-limiting example, FIG. 14 illustrates another functionalblock diagram of still other non-limiting embodiments of an exemplarygyroscope architecture 100, according to further non-limiting aspects ofthe subject disclosure. For instance, exemplary gyroscope architecture100 could yield a more compact but non-balanced drive and sense 3-axisgyroscope by omitting one half of the components of exemplary gyroscopearchitecture 100. Other variants can include omission of the GZ proofmasses to yield a 2-axis, X-Y gyroscope with drive system coupled to theGY or frame gyros as described herein.

Accordingly, in other non-limiting implementations, an exemplary MEMSdevice (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) comprising one or more inner frame gyroscope (e.g., GYor inner frame gyroscope comprising two or more GY proof masses 104,106, 108, 110, etc.) configured to sense a first component of angularvelocity associated with the MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) around a first axis(e.g., Y axis), for example, as described herein. As used herein, aframe gyroscope can be understood to comprise a guided mass systemcomprising two proof masses and a rotating arm connecting the two proofmasses and constraining the proof masses to anti-phase motion. Asfurther used herein an outer frame gyroscope can be understood tosurround and/or be flexibly coupled to the inner frame gyroscope.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise an outer frame gyroscope (e.g., GX or outer frame gyroscopecomprising two or more GX proof masses 132, 134, 136, 138, etc.)flexibly coupled (e.g., via coupling 148/150/152/154, or portionsthereof) to the one or more inner frame gyroscope (e.g., GY or innerframe gyroscope comprising two or more GY proof masses 104, 106, 108,110, etc.) and configured to sense a second component of angularvelocity associated with the MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) around a second axis(e.g., X axis) that can be orthogonal to the first axis (e.g., Y axis).

In addition, an exemplary MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) can further comprisetwo or more proof masses (e.g., of GZ proof masses 120, 122, 124, 126)coupled to the one or more inner frame gyroscope (e.g., GY or innerframe gyroscope comprising two or more GY proof masses 104, 106, 108,110, etc.) and configured to sense a third component of angular velocityassociated with the MEMS device (e.g., comprising exemplary gyroscopearchitecture 100, or portions thereof) around a third axis (e.g., Zaxis) that can be orthogonal to the first axis (e.g., Y axis) and thesecond axis (e.g., X axis).

In a non-limiting aspect, a motion associated with the two or more proofmasses (e.g., of GZ proof masses 120, 122, 124, 126) can be coupled, atleast in part, to in plane motion (e.g., X-Y plane) of the one or moreinner frame gyroscope (e.g., GY or inner frame gyroscope comprising twoor more GY proof masses 104, 106, 108, 110, etc.) via respectivecoupling mechanisms (e.g., via coupling mechanisms or lever arms 128,130), and wherein the in plane motion can be defined with reference to aplane comprising the first axis (e.g., Y axis) and the second axis(e.g., X axis). For instance, in another non-limiting aspect, the two ormore proof masses (e.g., of GZ proof masses 120, 122, 124, 126) can beconfigured to facilitate constraining, at least in part, the motionassociated with the two or more proof masses (e.g., of GZ proof masses120, 122, 124, 126) into a condition of linear and angular momentumbalance.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise one or more coupling mechanism (e.g., coupling mechanisms orlever arms 128, 130) between the two or more proof masses (e.g., of GZproof masses 120, 122, 124, 126) configured to force the two or moreproof masses (e.g., of GZ proof masses 120, 122, 124, 126) intoanti-phase motion as a result of the third component of angular velocityapplied to the MEMS device (e.g., comprising exemplary gyroscopearchitecture 100, or portions thereof) around the third axis (e.g., Zaxis).

In addition, an exemplary MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) can further comprisetwo or more drive shuttles (e.g., drive shuttles 310) coupled (e.g., vialever arms 112, 114, 116, 118, or portions thereof) to one or more ofthe one or more inner frame gyroscope (e.g., GY or inner frame gyroscopecomprising two or more GY proof masses 104, 106, 108, 110, etc.) or theouter frame gyroscope (e.g., GX or outer frame gyroscope comprising twoor more GX proof masses 132, 134, 136, 138, etc.) and configured toforce the one or more of the one or more inner frame gyroscope (e.g., GYor inner frame gyroscope comprising two or more GY proof masses 104,106, 108, 110, etc.) or the outer frame gyroscope (e.g., GX or outerframe gyroscope comprising two or more GX proof masses 132, 134, 136,138, etc.) into oscillation. In a non-limiting aspect, the outer framegyroscope (e.g., GX or outer frame gyroscope comprising two or more GXproof masses 132, 134, 136, 138, etc.) can be coupled to the one or moreinner frame gyroscope (e.g., GY or inner frame gyroscope comprising twoor more GY proof masses 104, 106, 108, 110, etc.) at least in part viathe two or more drive shuttles (e.g., drive shuttles 310).

In another non-limiting aspect, one or more of the outer frame gyroscope(e.g., GX or outer frame gyroscope comprising two or more GX proofmasses 132, 134, 136, 138, etc.), the one or more inner frame gyroscope(e.g., GY or inner frame gyroscope comprising two or more GY proofmasses 104, 106, 108, 110, etc.), or one or more of the two or moredrive shuttles can be configured to sense drive motion (e.g., via drivesense combs 312) associated with the oscillation. In still anothernon-limiting aspect, the two or more drive shuttles (e.g., driveshuttles 310) can be configured to move in anti-phase drive motion andcan be configured to minimize transmission of out of plane motion of thetwo or more drive shuttles (e.g., drive shuttles 310) to the one or moreinner frame gyroscope (e.g., GY or inner frame gyroscope comprising twoor more GY proof masses 104, 106, 108, 110, etc.).

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise one or more of the outer frame gyroscope (e.g., GX or outerframe gyroscope comprising two or more GX proof masses 132, 134, 136,138, etc.) or the one or more inner frame gyroscope (e.g., GY or innerframe gyroscope comprising two or more GY proof masses 104, 106, 108,110, etc.) can be configured to be driven by a set of drive electrodes(e.g., drive combs 314), for example, as described herein.

In addition, in still other non-limiting implementations, an exemplaryMEMS device (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) comprising one or more inner frame gyroscope (e.g., GYor inner frame gyroscope comprising two or more GY proof masses 104,106, 108, 110, etc.) configured to sense a first component of angularvelocity associated with the MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) around a first axis(e.g., Y axis), for example, as described herein.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise two or more proof masses (e.g., of GZ proof masses 120, 122,124, 126) coupled to the one or more inner frame gyroscope (e.g., GY orinner frame gyroscope comprising two or more GY proof masses 104, 106,108, 110, etc.) and configured to sense a second component of angularvelocity associated with the MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) around a second axis(e.g., Z axis) that can be orthogonal to the first axis (e.g., Y axis).

In addition, in still other non-limiting implementations, an exemplaryMEMS device (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) comprising one or more coupling mechanism between thetwo or more proof masses (e.g., of GZ proof masses 120, 122, 124, 126)configured to force the two or more proof masses (e.g., of GZ proofmasses 120, 122, 124, 126) into anti-phase motion as a result of thesecond component of angular velocity applied to the MEMS device (e.g.,comprising exemplary gyroscope architecture 100, or portions thereof)around the second axis (e.g., Z axis), for example, as described herein.In a non-limiting aspect, a motion associated with the two or more proofmasses (e.g., of GZ proof masses 120, 122, 124, 126) can be coupled, atleast in part, to in plane motion of the one or more inner framegyroscope (e.g., GY or inner frame gyroscope comprising two or more GYproof masses 104, 106, 108, 110, etc.) via respective couplingmechanisms, and wherein the in plane motion can be defined withreference to a plane normal to the second axis (e.g., X-Y plane). Inanother non-limiting aspect, the two or more proof masses (e.g., of GZproof masses 120, 122, 124, 126) can be configured to facilitateconstraining, at least in part, the motion associated with the two ormore proof masses (e.g., of GZ proof masses 120, 122, 124, 126) into acondition of linear and angular momentum balance.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise two or more drive shuttles (e.g., drive shuttles 310) coupledto the one or more inner frame gyroscope (e.g., GY or inner framegyroscope comprising two or more GY proof masses 104, 106, 108, 110,etc.) and configured to force the one or more inner frame gyroscope(e.g., GY or inner frame gyroscope comprising two or more GY proofmasses 104, 106, 108, 110, etc.) into oscillation. In a non-limitingaspect, the two or more drive shuttles (e.g., drive shuttles 310) can beconfigured to move in anti-phase drive motion and can be configured tominimize transmission of out of plane motion of the two or more driveshuttles (e.g., drive shuttles 310) to the one or more inner framegyroscope (e.g., GY or inner frame gyroscope comprising two or more GYproof masses 104, 106, 108, 110, etc.).

In other non-limiting implementations, in still other non-limitingimplementations, an exemplary MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) comprising two innerframe gyroscopes (e.g., GY or inner frame gyroscope comprising GY proofmasses 104, 106, 108, 110, etc.) configured to sense a first componentof angular velocity associated with the MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) around afirst axis (e.g., Y axis), for example, as described herein. As anon-limiting example, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can beconfigured to operate as one or more of a two axis gyroscope or a threeaxis gyroscope. In a non-limiting aspect, one of the two inner framegyroscopes (e.g., GY or inner frame gyroscope comprising GY proof masses104, 106, 108, 110, etc.) can be flexibly coupled (e.g., via a spring orflexure 145) to the other of the two inner frame gyroscopes (e.g., GY orinner frame gyroscope comprising GY proof masses 104, 106, 108, 110,etc.) and configured to constrain the out of plane and the in planemotion of the two inner frame gyroscopes (e.g., GY or inner framegyroscope comprising GY proof masses 104, 106, 108, 110, etc.) to be inphase.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise two outer frame gyroscopes (e.g., GX or outer frame gyroscopecomprising GX proof masses 132, 134, 136, 138, etc.) configured to sensea second component of angular velocity associated with the MEMS device(e.g., comprising exemplary gyroscope architecture 100, or portionsthereof) around a second axis (e.g., X axis) that can be orthogonal tothe first axis (e.g., Y axis). In a non-limiting aspect, the two outerframe gyroscopes (e.g., GX or outer frame gyroscope comprising GX proofmasses 132, 134, 136, 138, etc.) can be coupled (e.g., via coupling148/150/152/154, or portions thereof) to the two inner frame gyroscope(e.g., GY or inner frame gyroscope comprising two or more GY proofmasses 104, 106, 108, 110, etc.) at least in part via the four driveshuttles (e.g., drive shuttles 310). In another non-limiting aspect, oneor more of the outer frame gyroscope (e.g., GX or outer frame gyroscopecomprising two or more GX proof masses 132, 134, 136, 138, etc.) or theone or more of the two inner frame gyroscopes (e.g., GY or inner framegyroscope comprising GY proof masses 104, 106, 108, 110, etc.) can beconfigured to be driven by a set of drive electrodes (e.g., drive combs314, as further described herein.

As a further non-limiting example, the two outer frame gyroscopes (e.g.,GX or outer frame gyroscope comprising GX proof masses 132, 134, 136,138, etc.) can be flexibly coupled (e.g., via coupling 148/150/152/154,or portions thereof) to the two inner frame gyroscopes (e.g., GY orinner frame gyroscope comprising GY proof masses 104, 106, 108, 110,etc.) and configured to constrain out of plane and in plane motion ofthe two outer frame gyroscopes (e.g., GX or outer frame gyroscopecomprising GX proof masses 132, 134, 136, 138, etc.) and the two innerframe gyroscopes (e.g., GY or inner frame gyroscope comprising GY proofmasses 104, 106, 108, 110, etc.) to be in phase.

In addition, an exemplary MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) can further comprisefour proof masses (e.g., of GZ proof masses 120, 122, 124, 126) coupledto the two inner frame gyroscopes (e.g., GY or inner frame gyroscopecomprising GY proof masses 104, 106, 108, 110, etc.) and configured tosense a third component of angular velocity associated with the MEMSdevice (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) around a third axis (e.g., Z axis) that can beorthogonal to the first axis (e.g., Y axis) and the second axis (e.g., Xaxis).

Moreover, in still other non-limiting implementations, an exemplary MEMSdevice (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) comprising two coupling mechanisms (e.g., couplingmechanisms or lever arms 128, 130) associated with pairs of the fourproof masses (e.g., of GZ proof masses 120, 122, 124, 126) configured toforce the pairs of the four proof masses (e.g., of GZ proof masses 120,122, 124, 126) into anti-phase motion as a result of the third componentof angular velocity applied to the MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) around thethird axis (e.g., Z axis) and configured to result no net angularmomentum in the four proof masses (e.g., of GZ proof masses 120, 122,124, 126) as a result of the two inner frame gyroscopes (e.g., GY orinner frame gyroscope comprising GY proof masses 104, 106, 108, 110,etc.), for example, as described herein.

As further described herein, an exemplary MEMS device (e.g., comprisingexemplary gyroscope architecture 100, or portions thereof) can furthercomprise four drive shuttles (e.g., drive shuttles 310) coupled to oneor more of the two inner frame gyroscopes (e.g., GY or inner framegyroscope comprising GY proof masses 104, 106, 108, 110, etc.) or theouter frame gyroscope (e.g., GX or outer frame gyroscope comprising twoor more GX proof masses 132, 134, 136, 138, etc.) and configured toforce the one or more of the two inner frame gyroscopes (e.g., GY orinner frame gyroscope comprising GY proof masses 104, 106, 108, 110,etc.) or the outer frame gyroscope (e.g., GX or outer frame gyroscopecomprising two or more GX proof masses 132, 134, 136, 138, etc.) intooscillation. In a non-limiting aspect, one or more of the outer framegyroscope (e.g., GX or outer frame gyroscope comprising two or more GXproof masses 132, 134, 136, 138, etc.), the two inner frame gyroscopes(e.g., GY or inner frame gyroscope comprising GY proof masses 104, 106,108, 110, etc.), or one or more of the four drive shuttles (e.g., driveshuttles 310) can be configured to sense drive motion (e.g., via drivesense combs 312) associated with the oscillation. In anothernon-limiting aspect, pairs of the four drive shuttles (e.g., driveshuttles 310) can be configured to move in anti-phase drive motion andcan be configured to minimize transmission of out of plane motion of thepairs of the four drive shuttles (e.g., drive shuttles 310) to the twoinner frame gyroscopes (e.g., GY or inner frame gyroscope comprising GYproof masses 104, 106, 108, 110, etc.), as further described herein.

In addition, in still other non-limiting implementations, an exemplaryMEMS device (e.g., comprising exemplary gyroscope architecture 100, orportions thereof) comprising coupling mechanisms (e.g., via fixed pivotpoints 144 and respective outer frame lever arms 140/142 or portionsthereof) associated with two outer frame gyroscopes (e.g., GX or outerframe gyroscope comprising GX proof masses 132, 134, 136, 138, etc.)configured to force the two outer frame gyroscopes (e.g., GX or outerframe gyroscope comprising GX proof masses 132, 134, 136, 138, etc.)into anti-phase motion as a result of the second component of angularvelocity applied to the MEMS device (e.g., comprising exemplarygyroscope architecture 100, or portions thereof) around the second axis(e.g., X axis), for example, as described herein.

Other non-limiting implementations of exemplary MEMS device (e.g.,comprising exemplary gyroscope architecture 100, or portions thereof)can comprise a stress isolation frame (e.g., stress isolation frame 308)coupled to the MEMS device (e.g., comprising exemplary gyroscopearchitecture 100, or portions thereof) and configured to reject stresstransmitted from a package associated with the MEMS device (e.g.,comprising exemplary gyroscope architecture 100, or portions thereof) tothe MEMS device (e.g., comprising exemplary gyroscope architecture 100,or portions thereof), for example, as further described herein.

In view of the subject matter described supra, various methods can beimplemented in accordance with the subject disclosure directed tomethods of operation of the various embodiments described herein, interms of motions of the various components, actuation of the drivesystems, experiencing applied angular momentum, sensing the same, andso, as well as methods of fabrication direction to various fabricationsteps to form the component parts of the various embodiments herein. Forpurposes of simplicity of explanation, such methods can be described asa series of steps, and it is to be understood and appreciated that suchillustrations or corresponding descriptions as would be apprehended byone skilled in the art based on review of the embodiments herein, wouldnot be limited by the order of the steps, as some steps may occur indifferent orders and/or concurrently with other steps from what isdepicted and/or described herein.

What has been described above includes examples of the embodiments ofthe subject disclosure. While specific embodiments and examples aredescribed in the subject disclosure for illustrative purposes, variousmodifications are possible that are considered within the scope of suchembodiments and examples, as those skilled in the relevant art canrecognize. It is, of course, not possible to describe every conceivablecombination of configurations, components, and/or methods for purposesof describing the claimed subject matter, but it is to be appreciatedthat many further combinations and permutations of the variousembodiments are possible. Thus, although the disclosed subject matterhas been described in accordance with the embodiments shown, one ofordinary skill in the art will readily recognize that there could bevariations to the embodiments and those variations would be within thespirit and scope of the disclosed subject matter. Accordingly, manymodifications may be made by one of ordinary skill in the art withoutdeparting from the spirit and scope of the disclosed subject matter. Asa result, the claimed subject matter is intended to embrace all suchalterations, modifications, and variations that fall within the spiritand scope of the appended claims.

In addition, the words “example” or “exemplary” is used herein to meanserving as an example, instance, or illustration. Any aspect or designdescribed herein as “exemplary” is not necessarily to be construed aspreferred or advantageous over other aspects or designs. Rather, use ofthe word, “exemplary,” is intended to present concepts in a concretefashion. As used in this application, the term “or” is intended to meanan inclusive “or” rather than an exclusive “or”. That is, unlessspecified otherwise, or clear from context, “X employs A or B” isintended to mean any of the natural inclusive permutations. That is, ifX employs A; X employs B; or X employs both A and B, then “X employs Aor B” is satisfied under any of the foregoing instances. In addition,the articles “a” and “an” as used in this application and the appendedclaims should generally be construed to mean “one or more” unlessspecified otherwise or clear from context to be directed to a singularform.

In addition, while an aspect may have been disclosed with respect toonly one of several embodiments, such feature may be combined with oneor more other features of the other embodiments as may be desired andadvantageous for any given or particular application. Furthermore, tothe extent that the terms “includes,” “including,” “has,” “contains,”variants thereof, and other similar words are used in either thedetailed description or the claims, these terms are intended to beinclusive in a manner similar to the term “comprising” as an opentransition word without precluding any additional or other elements.

What is claimed is:
 1. A microelectromechanical systems (MEMS) device,comprising: at least one inner frame gyroscope configured to sense afirst component of angular velocity associated with the MEMS devicearound a first axis; an outer frame gyroscope flexibly coupled to the atleast one inner frame gyroscope and configured to sense a secondcomponent of angular velocity associated with the MEMS device around asecond axis that is orthogonal to the first axis; and at least two driveshuttles coupled to at least one of the at least one inner framegyroscope or the outer frame gyroscope and configured to force the atleast one of the at least one inner frame gyroscope or the outer framegyroscope into oscillation.
 2. The MEMS device of claim 1, furthercomprising: at least two proof masses coupled to the at least one innerframe gyroscope and configured to sense a third component of angularvelocity associated with the MEMS device around a third axis that isorthogonal to the first axis and the second axis.
 3. The MEMS device ofclaim 2, wherein a motion associated with the at least two proof massesis coupled, at least in part, to in plane motion of the at least oneinner frame gyroscope via respective coupling mechanisms, and whereinthe in plane motion is defined with reference to a plane comprising thefirst axis and the second axis.
 4. The MEMS device of claim 3, whereinthe at least two proof masses are configured to facilitate constraining,at least in part, the motion associated with the at least two proofmasses into a condition of linear and angular momentum balance.
 5. TheMEMS device of claim 2, further comprising: at least one couplingmechanism between the at least two proof masses configured to force theat least two proof masses into anti-phase motion as a result of thethird component of angular velocity applied to the MEMS device aroundthe third axis.
 6. The MEMS device of claim 1, wherein the outer framegyroscope is coupled to the at least one inner frame gyroscope at leastin part via the at least two drive shuttles.
 7. The MEMS device of claim1, wherein at least one of the outer frame gyroscope, the at least oneinner frame gyroscope, or at least one of the at least two driveshuttles is configured to sense drive motion associated with theoscillation.
 8. The MEMS device of claim 1, wherein the at least twodrive shuttles are configured to move in anti-phase drive motion and areconfigured to minimize transmission of out of plane motion of the atleast two drive shuttles to at least one of the outer frame gyroscope orthe at least one inner frame gyroscope.
 9. The MEMS device of claim 1,wherein at least one of the outer frame gyroscope or the at least oneinner frame gyroscope is configured to be driven by a set of driveelectrodes.
 10. A microelectromechanical systems (MEMS) device,comprising: at least one inner frame gyroscope configured to sense afirst component of angular velocity associated with the MEMS devicearound a first axis; at least two proof masses coupled to the at leastone inner frame gyroscope and configured to sense a second component ofangular velocity associated with the MEMS device around a second axisthat is orthogonal to the first axis; at least two drive shuttlescoupled to the at least one inner frame gyroscope and configured toforce the at least one inner frame gyroscope into oscillation; and atleast one coupling mechanism between the at least two proof massesconfigured to force the at least two proof masses into anti-phase motionas a result of the second component of angular velocity applied to theMEMS device around the second axis.
 11. The MEMS device of claim 10,wherein a motion associated with the at least two proof masses iscoupled, at least in part, to in plane motion of the at least one innerframe gyroscope via respective coupling mechanisms, and wherein the inplane motion is defined with reference to a plane normal to the secondaxis.
 12. The MEMS device of claim 11, wherein the at least two proofmasses are configured to facilitate constraining, at least in part, themotion associated with the at least two proof masses into a condition oflinear and angular momentum balance.
 13. The MEMS device of claim 10,wherein the at least two drive shuttles are configured to move inanti-phase drive motion and are configured to minimize transmission ofout of plane motion of the at least two drive shuttles to the at leastone inner frame gyroscope.
 14. A microelectromechanical systems (MEMS)device, comprising: two inner frame gyroscopes configured to sense afirst component of angular velocity associated with the MEMS devicearound a first axis; two outer frame gyroscopes configured to sense asecond component of angular velocity associated with the MEMS devicearound a second axis that is orthogonal to the first axis; four proofmasses coupled to the two inner frame gyroscopes and configured to sensea third component of angular velocity associated with the MEMS devicearound a third axis that is orthogonal to the first axis and the secondaxis; and wherein the two inner frame gyroscopes, the two outer framegyroscopes, and the four proof masses lie substantially in a plane thathas an axis of symmetry parallel to the first axis.
 15. The MEMS deviceof claim 14, further comprising: two coupling mechanisms associated withpairs of the four proof masses configured to force the pairs of the fourproof masses into anti-phase motion as a result of the third componentof angular velocity applied to the MEMS device around the third axis andconfigured to result in no net angular momentum in the four proof massesas a result of the two inner frame gyroscopes.
 16. The MEMS device ofclaim 14, wherein the MEMS device is configured to operate as at leastone of a one axis gyroscope, a two axis gyroscope, or a three axisgyroscope.
 17. The MEMS device of claim 14, further comprising: fourdrive shuttles coupled to at least one of the two inner frame gyroscopesor the outer frame gyroscope and configured to force the at least one ofthe two inner frame gyroscopes or the outer frame gyroscope intooscillation.
 18. The MEMS device of claim 17, wherein the two outerframe gyroscopes are coupled to the two inner frame gyroscope at leastin part via the four drive shuttles.
 19. The MEMS device of claim 17,wherein at least one of the outer frame gyroscope, the two inner framegyroscopes, or at least one of the four drive shuttles is configured tosense drive motion associated with the oscillation.
 20. The MEMS deviceof claim 17, wherein pairs of the four drive shuttles are configured tomove in anti-phase drive motion and are configured to minimizetransmission of out of plane motion of the pairs of the four driveshuttles to the two inner frame gyroscopes.
 21. The MEMS device of claim14, wherein at least one of the outer frame gyroscope or the at leastone of the two inner frame gyroscopes is configured to be driven by aset of drive electrodes.
 22. The MEMS device of claim 14, wherein thetwo outer frame gyroscopes are flexibly coupled to the two inner framegyroscopes and configured to constrain out of plane and in plane motionof the two outer frame gyroscopes and the two inner frame gyroscopes tobe in phase.
 23. The MEMS device of claim 22, wherein one of the twoinner frame gyroscopes is flexibly coupled to the other of the two innerframe gyroscopes and configured to constrain the out of plane and the inplane motion of the two inner frame gyroscopes to be in phase.
 24. TheMEMS device of claim 14, further comprising: coupling mechanismsassociated with two outer frame gyroscopes configured to force the twoouter frame gyroscopes into anti-phase motion as a result of the secondcomponent of angular velocity applied to the MEMS device around thesecond axis.
 25. The MEMS device of claim 14, further comprising: astress isolation frame coupling the MEMS device to at least one of asubstrate or package comprising the MEMS device.